Tungsten boats used for evaporation are usually produced using powder metallurgy processes. The following are the general steps for producing a tungsten boat for evaporation:
Raw material selection: Select high-purity metal tungsten powder, usually with a purity of 99.95%, as the main raw material for the production of tungsten boats. High purity ensures minimal contamination during evaporation. Mixing: Carefully mix tungsten powder using specialized equipment to achieve a homogeneous mixture and consistent material properties. Compaction: Mixed tungsten powder is placed into a mold and high pressure is applied, typically via cold isostatic pressing (CIP) or uniaxial pressing. The process compacts the powder into a dense and coherent shape that resembles the desired boat geometry. Pre-sintering: Compacted tungsten parts are pre-sintered at high temperatures in a controlled atmosphere, allowing the powder particles to bond and form a solid structure of increased strength. Sintering: The pre-sintered parts are then subjected to a high-temperature sintering process in a vacuum or hydrogen atmosphere. This process further densifies the material, removes residual pores, and promotes grain growth, resulting in a strong and dense tungsten boat. Machining and finishing: After sintering, the tungsten boat can undergo machining operations such as milling, turning or grinding to achieve the final dimensions, grooves and surface finish required for efficient evaporation of the material during the evaporation process. Quality Control: Finished tungsten boats are inspected for dimensional accuracy, surface integrity and material purity to ensure they meet specified requirements for evaporation applications.
Throughout the production process, strict quality control measures and process monitoring are crucial to ensure that the tungsten boat meets the stringent requirements of the vacuum deposition process. The resulting tungsten boat is able to withstand high temperatures and corrosive environments, making it suitable for a variety of vacuum evaporation applications across industries.
Tungsten boats are commonly used in vacuum evaporation processes, especially thin film deposition and semiconductor manufacturing. Here are some key applications of tungsten boat evaporation:
Thin film deposition: Tungsten boats are used in the physical vapor deposition (PVD) process to evaporate metals and other materials onto a substrate to form thin films of controlled thickness and composition. This is widely used in the production of electronic and optical coatings as well as decorative and functional surface treatments. Semiconductor Manufacturing: In the semiconductor industry, tungsten boats are commonly used to deposit thin film materials such as aluminum, titanium and other metal layers on silicon wafers. This is an important step in the manufacturing of integrated circuits, microelectromechanical systems (MEMS), and other electronic devices. Research and Development: Tungsten boats are used in laboratory and R&D environments to evaporate materials to study their properties, develop new thin film materials, and investigate novel coating technologies. This includes academic research institutions, government laboratories and industrial R&D facilities. Tungsten’s high melting point and excellent thermal stability make it an ideal material for boat-shaped crucibles used in evaporation processes. Tungsten boats can withstand the high temperatures required to evaporate a wide range of materials without significant deformation or degradation, ensuring consistent and reliable film deposition. Furthermore, their inertness and resistance to chemical reactions make them suitable for evaporating active and alloying elements in controlled environments.
Overall, tungsten boats play a vital role in precision thin film deposition and are an important component in various industries that rely on vacuum evaporation technology to manufacture advanced materials and electronic devices.
Product Name | Tungsten Boat For Evaporation |
Material | W1 |
Specification | Customized |
Surface | Black skin, alkali washed, polished. |
Technique | Sintering process, machining |
Meltng point | 3400℃ |
Density | 19.3g/cm3 |
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